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The sub-project "Online quality control, metrology" will target to characterize and analyse the online quality control requirements of the specified processes, as well as to develop and validate online micro- and nano-scale inspection techniques in object positioning, handling and assembling. Further to quantitatively manage the process performance data and provide an accurate generic database, to predict process trends and deal with fault diagnosis. The following issues need to be investigated for online quality control, metrology:

  • Development of micro- and nano-scale metrology techniques in accordance with the application requirements for hybrid ultra precision manufacturing processes

  • Development of quality control strategies for new micro-assembly systems

  • Monitoring of the process performance in positioning, handling and assembling of materials, components and devices and to develop appropriate evaluation metrics

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