FEMTOTOOLS AWARDS at the IEEE International Conference on Robotics and Automation (ICRA 2009) in Kobe, Japan
The first Six-Axis Micro Force Sensor
Force sensing is an important objective for automated tasks in micro- and nanorobotics. Micro force sensors are applied in the fields of micro-assembly, microsystems characterization, material science, biological research and biomedical research. The forces dominating micromanipulation are normally in the range of tens of nano-Newton up to hundreds of micro-Newtons.
Researchers at the Institute of Robotics and Intelligent Systems (ETH-IRIS) and FemtoTools GmbH developed the first MEMS six-axis force-torque sensor. The working principle is based on capacitive position measurement, similar to the FemtoTools single-axis sensor designs.
The new sensor design features a resolution which is about 1000 times better than conventional six-axis force sensors. Operating in the range of Micro-Newtons and Nano-Newtonmeters it provides a valuable and versatile tool for many micromanipulation tasks.
“Best Student Paper Award” and “Best Automation Paper Award” at ICRA 2009
The multi-axis MEMS force sensor design has been presented at the IEEE International Conference on Robotics and Automation (ICRA 2009) in Kobe, Japan . With 1629 paper submissions and 696 accepted papers ICRA is one of the two largest robotics conferences in the world. The presentation won two out of the seven ICRA awards: “best student paper award” and “best automation paper award”.
 F. Beyeler, S. Muntwyler, B. J. Nelson, "Design and Calibration of a Microfabricated 6-Axis Force-Torque Sensor for Microrobotic Applications, Proc. IEEE International Conference on Robotics and Automation (ICRA), Kobe, Japan, 2009, May 2009.